Plasma etched initial pits for electrochemically etched macroporous silicon structures

Kestutis Grigoras, Antti Niskanen, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)371-375
JournalJournal of Micromechanics and Microengineering
Volume11
Publication statusPublished - 2001
MoE publication typeA1 Journal article-refereed

Keywords

  • etching
  • KOH
  • macroporous
  • RIE
  • silicon

Cite this