Plasma-enhanced atomic layer deposition of aluminum nitride : characteristics and applications

Department of Electronics and Nanoengineering

Research output: Thesis › Doctoral Thesis › Collection of Articles

3 results
- Title(descending)

OtaNano
Rissanen, A. (Manager)
Aalto University
Facility/equipment: Facility
OtaNano - Nanofab
Repo, P. (Manager) & Rissanen, A. (Other)
OtaNano
Facility/equipment: Facility
OtaNano - Nanomicroscopy Center
Seitsonen, J. (Manager) & Rissanen, A. (Other)
OtaNano
Facility/equipment: Facility