Piezoelectrically transduced single-crystal-silicon plate resonators

Antti Jaakkola; Piia Rosenberg; Olli Holmgren; Kimmo Kokkonen; James Dekker; Arto Nurmela; Tuomas Pensala; Tommi Riekkinen; Tomi Mattila; Ari Alastalo

Piezoelectrically transduced single-crystal-silicon plate resonators

Antti Jaakkola
, Piia Rosenberg
, Olli Holmgren
, Kimmo Kokkonen
, James Dekker
, Arto Nurmela
, Tuomas Pensala
, Tommi Riekkinen
, Tomi Mattila
, Ari Alastalo

Department of Applied Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

32 Citations (Scopus)

Original language	English
Title of host publication	IEEE Ultrasonics Symposium, Beijing, China, Nov 2-5, 2008
Publication status	Published - 2008
MoE publication type	A4 Conference publication

Keywords

interferometry
MEMS resonator

Cite this

@inproceedings{a1c72ac108f14af6affb05e32147b267,

title = "Piezoelectrically transduced single-crystal-silicon plate resonators",

keywords = "interferometry, MEMS resonator, interferometry, MEMS resonator, interferometry, MEMS resonator",

author = "Antti Jaakkola and Piia Rosenberg and Olli Holmgren and Kimmo Kokkonen and James Dekker and Arto Nurmela and Tuomas Pensala and Tommi Riekkinen and Tomi Mattila and Ari Alastalo",

year = "2008",

language = "English",

booktitle = "IEEE Ultrasonics Symposium, Beijing, China, Nov 2-5, 2008",

}

TY - GEN

T1 - Piezoelectrically transduced single-crystal-silicon plate resonators

AU - Jaakkola, Antti

AU - Rosenberg, Piia

AU - Holmgren, Olli

AU - Kokkonen, Kimmo

AU - Dekker, James

AU - Nurmela, Arto

AU - Pensala, Tuomas

AU - Riekkinen, Tommi

AU - Mattila, Tomi

AU - Alastalo, Ari

PY - 2008

Y1 - 2008

KW - interferometry

KW - MEMS resonator

KW - interferometry

KW - MEMS resonator

KW - interferometry

KW - MEMS resonator

M3 - Conference article in proceedings

BT - IEEE Ultrasonics Symposium, Beijing, China, Nov 2-5, 2008

ER -