Piezoelectrically transduced single-crystal-silicon plate resonators

Antti Jaakkola, Piia Rosenberg, Olli Holmgren, Kimmo Kokkonen, James Dekker, Arto Nurmela, Tuomas Pensala, Tommi Riekkinen, Tomi Mattila, Ari Alastalo

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

30 Citations (Scopus)
Original languageEnglish
Title of host publicationIEEE Ultrasonics Symposium, Beijing, China, Nov 2-5, 2008
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication

Keywords

  • interferometry
  • MEMS resonator

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