Picosecond laser ablation for silicon micro fuel cell fabrication

Gianmario Scotti, Daniel Trusheim, Petri Kanninen, Denys Naumenko, Malte Shulz-Ruhtenberg, Valentinas Snitka, Tanja Kallio, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

9 Citations (Scopus)
208 Downloads (Pure)

Abstract

We have investigated laser ablation as a microfabrication approach to produce micro fuel cells (MFCs) in silicon. Picosecond pulses (15 ps) at a wavelength of 355 nm are used to make all of the MFC structures. To assess the benefits and drawbacks of laser ablation, reference cells have been produced by deep reactive ion etching (DRIE) using matching geometries. Ablated and etched cells have been evaluated and compared side by side. Our conclusion is that picosecond laser ablation is very well suited for MFC fabrication. The ablated cells match or excel DRIE-microfabricated cells in terms of current and power densities. Ablated MFCs achieved 47.6 mW cm-2 of power density and 121 mA cm-2 current density.
Original languageEnglish
Pages (from-to)1-14
Number of pages14
JournalJournal of Micromechanics and Microengineering
Volume23
Issue number5
DOIs
Publication statusPublished - 18 Apr 2013
MoE publication typeA1 Journal article-refereed

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