| Original language | English |
|---|---|
| Patent number | US9882070 |
| Priority date | 30/01/2018 |
| Filing date | 10/06/2016 |
| Publication status | Published - 2018 |
| MoE publication type | H1 Granted patent |
Photodetector structures and manufacturing the same
Hele Savin (Inventor), Ville Vähänissi (Inventor), Mikko Juntunen (Inventor), Päivikki Repo (Inventor), Antti Haarahiltunen (Inventor)
Research output: Patent