Phase sensitive measurements of surface vibrations using homodyne interferometry without stabilization

Lauri Lipiäinen, Kimmo Kokkonen, Olli Holmgren, Matti Kaivola

Research output: Working paperProfessional

Original languageEnglish
Publication statusPublished - 2009
MoE publication typeD4 Published development or research report or study

Publication series

NamePhysic Days 2009. The XLIII Annual Conference of the Finnish Physical Society, Espoo, Finland, March 12-14, 2009


  • laser interferometry
  • MEMS
  • microelectromechanical resonator
  • surface vibrations

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