Phase sensitive absolute amplitude detection of surface vibrations using homodyne interferometry without active stabilization

Lauri Lipiäinen, Kimmo Kokkonen, Matti Kaivola

Research output: Contribution to journalArticle

14 Citations (Scopus)
24 Downloads (Pure)

Abstract

A detection scheme for obtaining phase and absolute amplitude information of surface vibrations on microacoustic components using homodyne laser interferometry is described. The scheme does not require active stabilization of the optical path length of the interferometer. The detection setup is realized in a homodyne Michelson interferometer configuration, and selected measurements on a 374 MHz surface acoustic wave fan-shaped filter and two different piezoelectrically actuated micromechanical resonators are presented to demonstrate the performance of the instrument. With the current detection electronics, the interferometer is capable of detecting out-of-plane surface vibrations up to 2 GHz with a lateral resolution of better than 1 μm and with a minimum detectable vibration amplitude of ∼1 pm.
Original languageEnglish
Article number114510
Pages (from-to)1-5
Number of pages5
JournalJournal of Applied Physics
Volume108
Issue number11
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Keywords

  • interferometry
  • MEMS

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