Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation

Imtisal e. Noor; Jan Coenen; Andrew Martin; Olli Dahl

doi:10.1016/j.seppur.2019.116201

Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation

Imtisal e. Noor^*
, Jan Coenen
, Andrew Martin
, Olli Dahl

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

39 Citations (Scopus)

191 Downloads (Pure)

Abstract

Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity ~2.11 µS/cm, pH ~5.4, TOC ~1.13 ppm, IC ~0.24 ppm, TDS ~1.18 ppm and COD ~ 1.9 ppm; for most of the contaminants the separation efficiency was >99%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m³ whereas; the achievable exergy efficiency was ~19%.

Original language	English
Article number	116201
Number of pages	10
Journal	Separation and Purification Technology
Volume	235
DOIs	https://doi.org/10.1016/j.seppur.2019.116201
Publication status	Published - 18 Mar 2020
MoE publication type	A1 Journal article-refereed

Funding

This research has been conducted in collaboration between KTH Royal Institute of Technology, Sweden and Aalto University, Finland, funded through Erasmus Mundus Joint Doctorate Programme “Environomical Pathways for Sustainable Energy Services”, under the Framework Partnership Agreement FPA-2012-0034 between Education, Audiovisual and Culture Executive Agency (EACEA) and KTH as Coordinating Partner of the SELECT + Consortium. The case study has also been supported by the industrial partners including Xzero AB, Sweden and Interuniversity Microelectronics Center (imec), Belgium. This publication reflects the views only of the author(s) and mentioned organizations cannot be held responsible for any use, which may be made of the information contained therein.

Keywords

Chemical mechanical planarization
Energy analysis
Membrane distillation
Nano-electronics
Separation efficiency

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CHEM-Noor et al-Performance assessment-2019-SepaPuriTechFinal published version, 988 KBLicence: CC BY

Cite this

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title = "Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation",

abstract = "Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity \textasciitilde{}2.11 µS/cm, pH \textasciitilde{}5.4, TOC \textasciitilde{}1.13 ppm, IC \textasciitilde{}0.24 ppm, TDS \textasciitilde{}1.18 ppm and COD \textasciitilde{} 1.9 ppm; for most of the contaminants the separation efficiency was >99\%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m3 whereas; the achievable exergy efficiency was \textasciitilde{}19\%.",

keywords = "Chemical mechanical planarization, Energy analysis, Membrane distillation, Nano-electronics, Separation efficiency",

author = "Noor, \{Imtisal e.\} and Jan Coenen and Andrew Martin and Olli Dahl",

year = "2020",

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doi = "10.1016/j.seppur.2019.116201",

language = "English",

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journal = "Separation and Purification Technology",

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T1 - Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation

AU - Noor, Imtisal e.

AU - Coenen, Jan

AU - Martin, Andrew

AU - Dahl, Olli

PY - 2020/3/18

Y1 - 2020/3/18

N2 - Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity ~2.11 µS/cm, pH ~5.4, TOC ~1.13 ppm, IC ~0.24 ppm, TDS ~1.18 ppm and COD ~ 1.9 ppm; for most of the contaminants the separation efficiency was >99%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m3 whereas; the achievable exergy efficiency was ~19%.

AB - Wastewater from chemical mechanical planarization (CMP) processes in nano-electronics industries must be treated properly in order to fulfil local and international environmental regulations. This study is focused on a performance assessment of membrane distillation (MD) technology for CMP wastewater treatment. A new prototype of air gap membrane distillation (AGMD) module was utilized, with feed water consisting of CMP wastewater collected from imec, Belgium. The module was tested at different operating conditions (temperatures, flow rates and filtration time) and responses in terms of separation efficiency, permeate water quality, transmembrane flux, specific heat demand and exergy efficiency were determined. High quality permeate was produced in all trials, i.e. conductivity ~2.11 µS/cm, pH ~5.4, TOC ~1.13 ppm, IC ~0.24 ppm, TDS ~1.18 ppm and COD ~ 1.9 ppm; for most of the contaminants the separation efficiency was >99%. These findings clearly show that the resulting MD permeate does not exceed environmental regulations for release to recipient, and the permeate can even be considered for reuse. Moreover, the determined specific heat demand at different operating conditions was varying between 1390 and 2170 kWh/m3 whereas; the achievable exergy efficiency was ~19%.

KW - Chemical mechanical planarization

KW - Energy analysis

KW - Membrane distillation

KW - Nano-electronics

KW - Separation efficiency

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DO - 10.1016/j.seppur.2019.116201

M3 - Article

AN - SCOPUS:85073547535

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JO - Separation and Purification Technology

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M1 - 116201

ER -

Performance assessment of chemical mechanical planarization wastewater treatment in nano-electronics industries using membrane distillation

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