PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters

K. Huikko; P. Östman; K. Grigoras; S. Tuomikoski; V.-M. Tiainen; A. Soininen; A. Manz; S. Franssila; R. Kostiainen; T. Kotiaho

PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters

K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V.-M. Tiainen, A. Soininen, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho

School of Electrical Engineering

Research output: Working paper › Professional

Original language	English
Pages	506
Publication status	Published - 2002
MoE publication type	D4 Published development or research report or study

Publication series

Name	MicroTAS 2002, Nara, Japan

Keywords

casting
diamond
electrospray
master
PDMS
SU-8

Cite this

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title = "PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters",

keywords = "casting, diamond, electrospray, master, PDMS, SU-8, casting, diamond, electrospray, master, PDMS, SU-8, casting, diamond, electrospray, master, PDMS, SU-8",

author = "K. Huikko and P. {\"O}stman and K. Grigoras and S. Tuomikoski and V.-M. Tiainen and A. Soininen and A. Manz and S. Franssila and R. Kostiainen and T. Kotiaho",

year = "2002",

language = "English",

series = "MicroTAS 2002, Nara, Japan",

pages = "506",

type = "WorkingPaper",

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TY - UNPB

T1 - PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters

AU - Huikko, K.

AU - Östman, P.

AU - Grigoras, K.

AU - Tuomikoski, S.

AU - Tiainen, V.-M.

AU - Soininen, A.

AU - Manz, A.

AU - Franssila, S.

AU - Kostiainen, R.

AU - Kotiaho, T.

PY - 2002

Y1 - 2002

KW - casting

KW - diamond

KW - electrospray

KW - master

KW - PDMS

KW - SU-8

KW - casting

KW - diamond

KW - electrospray

KW - master

KW - PDMS

KW - SU-8

KW - casting

KW - diamond

KW - electrospray

KW - master

KW - PDMS

KW - SU-8

M3 - Working paper

T3 - MicroTAS 2002, Nara, Japan

SP - 506

BT - PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters

ER -