PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters

K. Huikko; P. Östman; K. Grigoras; S. Tuomikoski; V.-M. Tiainen; A. Soininen; K. Puolanne; A. Manz; S. Franssila; R. Kostiainen; T. Kotiaho

PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters

K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V.-M. Tiainen, A. Soininen, K. Puolanne, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho

Research output: Working paper › Professional

Original language	English
Publication status	Published - 2002
MoE publication type	D4 Published development or research report or study

Publication series

Name	CHEMSEM-seminaari, Espoo, 12.12.2002

Keywords

electrospray
PDMS

Cite this

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title = "PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters",

keywords = "electrospray, PDMS, electrospray, PDMS, electrospray, PDMS",

author = "K. Huikko and P. {\"O}stman and K. Grigoras and S. Tuomikoski and V.-M. Tiainen and A. Soininen and K. Puolanne and A. Manz and S. Franssila and R. Kostiainen and T. Kotiaho",

year = "2002",

language = "English",

series = "CHEMSEM-seminaari, Espoo, 12.12.2002",

type = "WorkingPaper",

}

TY - UNPB

T1 - PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters

AU - Huikko, K.

AU - Östman, P.

AU - Grigoras, K.

AU - Tuomikoski, S.

AU - Tiainen, V.-M.

AU - Soininen, A.

AU - Puolanne, K.

AU - Manz, A.

AU - Franssila, S.

AU - Kostiainen, R.

AU - Kotiaho, T.

PY - 2002

Y1 - 2002

KW - electrospray

KW - PDMS

KW - electrospray

KW - PDMS

KW - electrospray

KW - PDMS

M3 - Working paper

T3 - CHEMSEM-seminaari, Espoo, 12.12.2002

BT - PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters

ER -