Patterning of sapphire / GaN substrates

Sami Suihkonen, Muhammad Ali, Olli Svensk, Sakari Sintonen, Markku Sopanen, Harri Lipsanen, Pekka T. Törmä, V. Nevedomsky, N Bert

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)
Original languageEnglish
Pages (from-to)1509-1512
Number of pages4
JournalPHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS
Volume8
Issue number5
DOIs
Publication statusPublished - May 2011
MoE publication typeA1 Journal article-refereed

Keywords

  • GaN, thin film, epitaxial growth, GaN/sapphire interface, patterning

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