Patterning high-temperature superconducting thin films

J. Meltaus, M. Kiviranta, T. Kajava, M. Salomaa

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationTurku
Pages8
Publication statusPublished - 1999
MoE publication typeD4 Published development or research report or study

Publication series

NameXXXIII Annual Conference of the Finnish Physical Society, Turku, March 4-6, 1999
PublisherUniversity of Turku

Keywords

  • high-temperature superconductors
  • photolithography
  • pulsed laser deposition
  • superconducting components
  • thin films

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