Pattern shape effects and artefacts in deep silicon etching

J. Kiihamäki, Sami Franssila

Research output: Contribution to journalArticleScientificpeer-review

82 Citations (Scopus)
Original languageEnglish
Pages (from-to)2280-2285
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
VolumeA17
Issue number4
DOIs
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

Keywords

  • silicon etching

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