Passivation of GaAs surface by atomic-layer-deposited titanium nitride

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • Vesa Bosund
  • Abuduwayiti Aierken
  • Jouni Tiilikainen
  • Teppo Hakkarainen
  • Harri Lipsanen

Research units

Details

Original languageEnglish
Pages (from-to)5385-5389
Number of pages5
JournalApplied Surface Science
Volume254
Issue number17
Publication statusPublished - 30 Jun 2008
MoE publication typeA1 Journal article-refereed

    Research areas

  • ALD, GaAs

ID: 3584385