@article{5204cbfafed4489a90b4f3e65cbc73f3,
title = "Passivation of GaAs surface by atomic-layer-deposited titanium nitride",
keywords = "ALD, GaAs, ALD, GaAs, ALD, GaAs",
author = "Vesa Bosund and Abuduwayiti Aierken and Jouni Tiilikainen and Teppo Hakkarainen and Harri Lipsanen",
year = "2008",
month = jun,
day = "30",
doi = "10.1016/j.apsusc.2008.02.070",
language = "English",
volume = "254",
pages = "5385--5389",
journal = "Applied Surface Science",
issn = "1873-5584",
publisher = "Elsevier",
number = "17",
}