Passivation of GaAs surface by atomic-layer-deposited titanium nitride

Vesa Bosund, Abuduwayiti Aierken, Jouni Tiilikainen, Teppo Hakkarainen, Harri Lipsanen

    Research output: Contribution to journalArticleScientificpeer-review

    13 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)5385-5389
    Number of pages5
    JournalApplied Surface Science
    Volume254
    Issue number17
    DOIs
    Publication statusPublished - 30 Jun 2008
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • GaAs

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