Passivation of Detector‐Grade FZ‐Si with ALD‐Grown Aluminium Oxide

Research output: Contribution to journalArticle


  1. 2019
  2. Passivation of detector-grade Fz-Si with atomic layer deposited aluminium oxide

    Toni Pasanen (Speaker), Jennifer Ott (Contributor), Päivikki Repo (Contributor), Heli Seppänen (Contributor), Ville Vähänissi (Contributor), Hele Savin (Contributor)
    23 Sep 2019

    Activity: Talk or presentation typesConference presentation

ID: 35318497