Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide

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Original languageEnglish
Pages (from-to)950-954
JournalPHYSICA STATUS SOLIDI: RAPID RESEARCH LETTERS
Volume7
Issue number11
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

    Research areas

  • Al2O3, black silicon, boron diffusion, surface passivation

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