Passivation of Al(x)Ga(1-x)As for Ohmic Contact Formation

E.O. Ristolainen, V. Fischer, P.H. Holloway, T.W. Haas, W.V. Lampert

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationECASIA 93 5th Conference on Applications of Surface and Interface Analysis, 4-8 Oct, 1993, Catania, Italy
    Publication statusPublished - 1993
    MoE publication typeA4 Article in a conference publication

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