Parametric study of square-extensional mode in piezoelectrically transduced microelectromechanical resonators

L. Lipiäinen, K. Kokkonen, A. Jaakkola, M. Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationPhysics Days 2011, Helsinki, March 29-31, 2011
Pages78
Publication statusPublished - 2011
MoE publication typeA4 Article in a conference publication

Keywords

  • laser interferometry
  • MEMS
  • microelectromechanical resonator

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