Oxygen in silicon

Eero Haimi

Oxygen in silicon

Eero Haimi

Department of Chemistry and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Chapter › Scientific › peer-review

2 Citations (Web of Science)

Original language	English
Title of host publication	Handbook of silicon based MEMS materials and technologies
Editors	Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka
Place of Publication	Burlington, MA USA; Oxford, UK
Publisher	Elsevier
Pages	59-70
ISBN (Print)	978-0-8155-1594-4
Publication status	Published - 2010
MoE publication type	A3 Book section, Chapters in research books

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

oxygen
silicon

Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical Engineering
Facility/equipment: Facility

Cite this

@inbook{fe6baf7d88dd44f38d9f2356e8db2de8,

title = "Oxygen in silicon",

keywords = "oxygen, silicon, oxygen, silicon, oxygen, silicon",

author = "Eero Haimi",

year = "2010",

language = "English",

isbn = "978-0-8155-1594-4",

pages = "59--70",

editor = "Veikko Lindroos and Markku Tilli and Ari Lehto and Teruaki Motooka",

booktitle = "Handbook of silicon based MEMS materials and technologies",

publisher = "Elsevier",

address = "Netherlands",

}

TY - CHAP

T1 - Oxygen in silicon

AU - Haimi, Eero

PY - 2010

Y1 - 2010

KW - oxygen

KW - silicon

KW - oxygen

KW - silicon

KW - oxygen

KW - silicon

M3 - Chapter

SN - 978-0-8155-1594-4

SP - 59

EP - 70

BT - Handbook of silicon based MEMS materials and technologies

A2 - Lindroos, Veikko

A2 - Tilli, Markku

A2 - Lehto, Ari

A2 - Motooka, Teruaki

PB - Elsevier

CY - Burlington, MA USA; Oxford, UK

ER -

Oxygen in silicon

UN SDGs

Keywords

Equipment

Raw Materials Research Infrastructure

Cite this