Oxygen in silicon

Eero Haimi

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationHandbook of silicon based MEMS materials and technologies
EditorsVeikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka
Place of PublicationBurlington, MA USA; Oxford, UK
ISBN (Print)978-0-8155-1594-4
Publication statusPublished - 2010
MoE publication typeA3 Part of a book or another research book


  • oxygen
  • silicon

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