Oxygen and bulk microdefects in silicon

Hele Savin, Veli-Matti Airaksinen

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Original languageEnglish
Title of host publicationHandbook of silicon based MEMS materials and technologies
Place of PublicationBurlington, MA USA; Oxford UK
Pages327-330
Publication statusPublished - 2010
MoE publication typeA3 Part of a book or another research book

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