Overview of early publications on Atomic Layer Deposition

Jaan Aarik; Andrew R. Akbashev; David Cameron; Jeffrey Elam; Simon Elliott; Gloria Gottardi; Kestutis Grigoras; Yury Koshtyal; Marja-Leena Kääriäinen; Tommi Kääriäinen; Anatoly Malkov; Anatoly Malygin; Jyrki Molarius; Juha Nikkola; Henrik Pedersen; Riikka L. Puurunen; Robin H. A. Ras; Fred Roozeboom; Hele Savin; Thomas E. Seidel; Jonas Sundqvist; J.Ruud van Ommen; Oili M. E. Ylivaara

Overview of early publications on Atomic Layer Deposition

Jaan Aarik, Andrew R. Akbashev, David Cameron, Jeffrey Elam, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Juha Nikkola, Henrik Pedersen, Riikka L. Puurunen, Robin H. A. Ras, Fred Roozeboom, Hele Savin, Thomas E. SeidelJonas Sundqvist, J.Ruud van Ommen, Oili M. E. Ylivaara

Electron Physics Group (EPG)

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	Technical Program & Abstracts
Publisher	American Vacuum Society
Publication status	Published - 2014
MoE publication type	A4 Conference publication

Cite this

Aarik, J., Akbashev, A. R., Cameron, D., Elam, J., Elliott, S., Gottardi, G., Grigoras, K., Koshtyal, Y., Kääriäinen, M.-L., Kääriäinen, T., Malkov, A., Malygin, A., Molarius, J., Nikkola, J., Pedersen, H., Puurunen, R. L., Ras, R. H. A., Roozeboom, F., Savin, H., ... Ylivaara, O. M. E. (2014). Overview of early publications on Atomic Layer Deposition. In Technical Program & Abstracts American Vacuum Society.

@inproceedings{c765ce19801244eeb6e0ecc280d2d42c,

title = "Overview of early publications on Atomic Layer Deposition",

author = "Jaan Aarik and Akbashev, {Andrew R.} and David Cameron and Jeffrey Elam and Simon Elliott and Gloria Gottardi and Kestutis Grigoras and Yury Koshtyal and Marja-Leena K{\"a}{\"a}ri{\"a}inen and Tommi K{\"a}{\"a}ri{\"a}inen and Anatoly Malkov and Anatoly Malygin and Jyrki Molarius and Juha Nikkola and Henrik Pedersen and Puurunen, {Riikka L.} and Ras, {Robin H. A.} and Fred Roozeboom and Hele Savin and Seidel, {Thomas E.} and Jonas Sundqvist and {van Ommen}, J.Ruud and Ylivaara, {Oili M. E.}",

year = "2014",

language = "English",

booktitle = "Technical Program & Abstracts",

publisher = "American Vacuum Society",

address = "United States",

}

Aarik, J, Akbashev, AR, Cameron, D, Elam, J, Elliott, S, Gottardi, G, Grigoras, K, Koshtyal, Y, Kääriäinen, M-L, Kääriäinen, T, Malkov, A, Malygin, A, Molarius, J, Nikkola, J, Pedersen, H, Puurunen, RL , Ras, RHA, Roozeboom, F, Savin, H, Seidel, TE, Sundqvist, J, van Ommen, JR & Ylivaara, OME 2014, Overview of early publications on Atomic Layer Deposition. in Technical Program & Abstracts. American Vacuum Society.

TY - GEN

T1 - Overview of early publications on Atomic Layer Deposition

AU - Aarik, Jaan

AU - Akbashev, Andrew R.

AU - Cameron, David

AU - Elam, Jeffrey

AU - Elliott, Simon

AU - Gottardi, Gloria

AU - Grigoras, Kestutis

AU - Koshtyal, Yury

AU - Kääriäinen, Marja-Leena

AU - Kääriäinen, Tommi

AU - Malkov, Anatoly

AU - Malygin, Anatoly

AU - Molarius, Jyrki

AU - Nikkola, Juha

AU - Pedersen, Henrik

AU - Puurunen, Riikka L.

AU - Ras, Robin H. A.

AU - Roozeboom, Fred

AU - Savin, Hele

AU - Seidel, Thomas E.

AU - Sundqvist, Jonas

AU - van Ommen, J.Ruud

AU - Ylivaara, Oili M. E.

PY - 2014

Y1 - 2014

M3 - Conference article in proceedings

BT - Technical Program & Abstracts

PB - American Vacuum Society

ER -