Original language | English |
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Title of host publication | 14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014 |
Publication status | Published - 2014 |
MoE publication type | A4 Conference publication |
Overview of early publications on Atomic Layer Deposition
Jaan Aarik, Andrew R. Akbashev, David Cameron, Jeffrey Elam, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Juha Nikkola, Henrik Pedersen, Riikka L. Puurunen, Robin H. A. Ras, Fred Roozeboom, Hele Savin, Thomas E. Seidel
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review