Overview of early publications on Atomic Layer Deposition

Jaan Aarik, Andrew R. Akbashev, David Cameron, Jeffrey Elam, Simon Elliott, Gloria Gottardi, Kestutis Grigoras, Yury Koshtyal, Marja-Leena Kääriäinen, Tommi Kääriäinen, Anatoly Malkov, Anatoly Malygin, Jyrki Molarius, Juha Nikkola, Henrik Pedersen, Riikka L. Puurunen, Robin H. A. Ras, Fred Roozeboom, Hele Savin, Thomas E. SeidelJonas Sundqvist, J.Ruud van Ommen, Oili M. E. Ylivaara

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Original languageEnglish
Title of host publication14th International Conference on Atomic Layer Deposition, Kyoto, Japan, June 15-18, 2014
Publication statusPublished - 2014
MoE publication typeA4 Conference publication

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