@inbook{bd2dadfea0804c8aa35cd2c107e947c5,
title = "Organometallic precursors for atomic layer deposition",
keywords = "atomic layer deposition, cyclopentadienyl compounds, metal alkyl precursors, metallocenes, thin films, atomic layer deposition, cyclopentadienyl compounds, metal alkyl precursors, metallocenes, thin films, atomic layer deposition, cyclopentadienyl compounds, metal alkyl precursors, metallocenes, thin films",
author = "Matti Putkonen and Lauri Niinist{\"o}",
year = "2005",
language = "English",
pages = "125--145",
editor = "R. Fischer",
booktitle = "Topics in organometallic chemistry, vol 9",
}