Organometallic precursors for atomic layer deposition

Matti Putkonen, Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    Original languageEnglish
    Title of host publicationTopics in organometallic chemistry, vol 9
    EditorsR. Fischer
    Place of PublicationBerlin
    Pages125-145
    Publication statusPublished - 2005
    MoE publication typeA3 Part of a book or another research book

    Keywords

    • atomic layer deposition
    • cyclopentadienyl compounds
    • metal alkyl precursors
    • metallocenes
    • thin films

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