(oral talk) Nanometer-scale depth-resolved ALD SiO2 thin films by GDOES

Zhen Zhu; Chiara Modanese; Perttu Sippola; Marisa Di Sabatino; Hele Savin

(oral talk) Nanometer-scale depth-resolved ALD SiO₂ thin films by GDOES

Zhen Zhu^*
, Chiara Modanese
, Perttu Sippola
, Marisa Di Sabatino
, Hele Savin

^*Corresponding author for this work

Beneq Oy
Norwegian University of Science and Technology

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2017
MoE publication type	Not Eligible
Event	ALTECH EMRS Symposium: Analytical techniques for precise characterization of nano materials - Strasbourg, France Duration: 22 May 2017 → 26 May 2017

Conference

Conference	ALTECH EMRS Symposium
Country/Territory	France
City	Strasbourg
Period	22/05/2017 → 26/05/2017

Keywords

atomic layer deposition
glow discharge optical emission spectroscopy
SiO
thin films

Cite this

@conference{d4a1af4b983f4fe193381cb5384ac9b1,

title = "(oral talk) Nanometer-scale depth-resolved ALD SiO2 thin films by GDOES",

keywords = "atomic layer deposition, glow discharge optical emission spectroscopy, SiO, thin films",

author = "Zhen Zhu and Chiara Modanese and Perttu Sippola and \{Di Sabatino\}, Marisa and Hele Savin",

year = "2017",

language = "English",

note = "ALTECH EMRS Symposium : Analytical techniques for precise characterization of nano materials ; Conference date: 22-05-2017 Through 26-05-2017",

}

TY - CONF

T1 - (oral talk) Nanometer-scale depth-resolved ALD SiO2 thin films by GDOES

AU - Zhu, Zhen

AU - Modanese, Chiara

AU - Sippola, Perttu

AU - Di Sabatino, Marisa

AU - Savin, Hele

PY - 2017

Y1 - 2017

KW - atomic layer deposition

KW - glow discharge optical emission spectroscopy

KW - SiO

KW - thin films

M3 - Abstract

T2 - ALTECH EMRS Symposium

Y2 - 22 May 2017 through 26 May 2017

ER -