@conference{72639391a2544837a0e956b0700d33e6,
title = "(oral talk) Modeling and optimization of internal gettering of iron in silicon",
keywords = "internal gettering, iron, silicon, simulation, internal gettering, iron, silicon, simulation, internal gettering, iron, silicon, simulation",
author = "Antti Haarahiltunen and {V{\"a}in{\"o}l{\"a} (Savin)}, Hele and Olli Anttila and Marko Yli-Koski and Juha Sinkkonen",
year = "2006",
language = "English",
note = "Electrochemical Society Meeting, ECS ; Conference date: 29-10-2006 Through 03-11-2006",
}