(oral talk) Low Temperature Plasma-enhanced ALD for SiO2 Using CO2

Zhen Zhu; Perttu Sippola; Chiara Modanese; Oili Ylivaara; Saoussen Merdes; Kenichiro Mizohata; Emma Salmi; Marisa Di Sabatino; Hele Savin

(oral talk) Low Temperature Plasma-enhanced ALD for SiO₂ Using CO₂

Zhen Zhu^*, Perttu Sippola, Chiara Modanese, Oili Ylivaara, Saoussen Merdes, Kenichiro Mizohata, Emma Salmi, Marisa Di Sabatino, Hele Savin

^*Corresponding author for this work

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2019
MoE publication type	Not Eligible
Event	International Conference on ALD Applications & China ALD Conference - Shenzhen, China Duration: 14 Oct 2018 → 17 Oct 2018 Conference number: 4

Conference

Conference	International Conference on ALD Applications & China ALD Conference
Country/Territory	China
City	Shenzhen
Period	14/10/2018 → 17/10/2018

Keywords

ALD
Carbon dioxide
Oxidation
Plasma
Radicals
Silicon dioxide

Access to Document

https://s32961.pcdn.co/wp-content/uploads/2020/03/china_ald_2018_zhu.pdf

Cite this

@conference{73a3d83218e44e2d867b765a95dba79b,

title = "(oral talk) Low Temperature Plasma-enhanced ALD for SiO2 Using CO2",

keywords = "ALD, Carbon dioxide, Oxidation, Plasma, Radicals, Silicon dioxide",

author = "Zhen Zhu and Perttu Sippola and Chiara Modanese and Oili Ylivaara and Saoussen Merdes and Kenichiro Mizohata and Emma Salmi and {Di Sabatino}, Marisa and Hele Savin",

year = "2019",

language = "English",

note = "International Conference on ALD Applications & China ALD Conference ; Conference date: 14-10-2018 Through 17-10-2018",

}

TY - CONF

T1 - (oral talk) Low Temperature Plasma-enhanced ALD for SiO2 Using CO2

AU - Zhu, Zhen

AU - Sippola, Perttu

AU - Modanese, Chiara

AU - Ylivaara, Oili

AU - Merdes, Saoussen

AU - Mizohata, Kenichiro

AU - Salmi, Emma

AU - Di Sabatino, Marisa

AU - Savin, Hele

N1 - Conference code: 4

PY - 2019

Y1 - 2019

KW - ALD

KW - Carbon dioxide

KW - Oxidation

KW - Plasma

KW - Radicals

KW - Silicon dioxide

M3 - Abstract

T2 - International Conference on ALD Applications & China ALD Conference

Y2 - 14 October 2018 through 17 October 2018

ER -