(oral talk) High-sensitivity NIR photodiodes using black silicon

Juha Heinonen; Antti Haarahiltunen; Michael Serue; Ville Vähänissi; Toni Pasanen; Hele Savin; Lutz Werner; Mikko Juntunen

(oral talk) High-sensitivity NIR photodiodes using black silicon

Juha Heinonen, Antti Haarahiltunen, Michael Serue, Ville Vähänissi, Toni Pasanen, Hele Savin, Lutz Werner, Mikko Juntunen

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2020
MoE publication type	Not Eligible
Event	SPIE Photonics West - Moscone Center, San Francisco, United States Duration: 1 Feb 2020 → 6 Feb 2020

Conference

Conference	SPIE Photonics West
Country/Territory	United States
City	San Francisco
Period	01/02/2020 → 06/02/2020

Keywords

Black Silicon
near infrared
responsivity
silicon
photodiode

OpenUrl availability

Full text

Photonics Research and Innovation
Savin, H., Ayedh, H., Mulbagal Rajanna, P., Vähänissi, V., Rauha, I. & Liu, H.
01/01/2019 → 31/12/2022
Project: Academy of Finland: Other research funding

OtaNano
Anna Rissanen (Manager)
Aalto University
Facility/equipment: Facility
OtaNano - Nanofab
Päivikki Repo (Manager)
OtaNano
Facility/equipment: Facility

Cite this

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title = "(oral talk) High-sensitivity NIR photodiodes using black silicon",

keywords = "Black Silicon, near infrared, responsivity, silicon, photodiode",

author = "Juha Heinonen and Antti Haarahiltunen and Michael Serue and Ville V{\"a}h{\"a}nissi and Toni Pasanen and Hele Savin and Lutz Werner and Mikko Juntunen",

year = "2020",

language = "English",

note = "SPIE Photonics West ; Conference date: 01-02-2020 Through 06-02-2020",

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TY - CONF

T1 - (oral talk) High-sensitivity NIR photodiodes using black silicon

AU - Heinonen, Juha

AU - Haarahiltunen, Antti

AU - Serue, Michael

AU - Vähänissi, Ville

AU - Pasanen, Toni

AU - Savin, Hele

AU - Werner, Lutz

AU - Juntunen, Mikko

PY - 2020

Y1 - 2020

KW - Black Silicon

KW - near infrared

KW - responsivity

KW - silicon

KW - photodiode

M3 - Abstract

T2 - SPIE Photonics West

Y2 - 1 February 2020 through 6 February 2020

ER -

(oral talk) High-sensitivity NIR photodiodes using black silicon

Conference

Keywords

OpenUrl availability

Projects

Photonics Research and Innovation

Equipment

OtaNano

OtaNano - Nanofab

Cite this