(oral talk) Gettering of iron in silicon by boron implantation

Antti Haarahiltunen; Heli Talvitie; Hele Savin; O. Anttila; Marko Yli-Koski; M. I. Asghar; Juha Sinkkonen

(oral talk) Gettering of iron in silicon by boron implantation

Antti Haarahiltunen
, Heli Talvitie
, Hele Savin
, O. Anttila
, Marko Yli-Koski
, M. I. Asghar
, Juha Sinkkonen

Electron Physics Group (EPG)

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2007
MoE publication type	Not Eligible
Event	International Conference on Defects Recognition, Imaging and Physics of Semiconductors - Berlin, Germany Duration: 3 Sept 2007 → 7 Sept 2007 Conference number: 11

Conference

Conference	International Conference on Defects Recognition, Imaging and Physics of Semiconductors
Abbreviated title	DRIP
Country/Territory	Germany
City	Berlin
Period	03/09/2007 → 07/09/2007

Keywords

boron
gettering
iron
silicon

Cite this

@conference{5e252fe2f8b9409186b3d60e886b4c78,

title = "(oral talk) Gettering of iron in silicon by boron implantation",

keywords = "boron, gettering, iron, silicon, boron, gettering, iron, silicon, boron, gettering, iron, silicon",

author = "Antti Haarahiltunen and Heli Talvitie and Hele Savin and O. Anttila and Marko Yli-Koski and Asghar, \{M. I.\} and Juha Sinkkonen",

year = "2007",

language = "English",

note = "International Conference on Defects Recognition, Imaging and Physics of Semiconductors, DRIP ; Conference date: 03-09-2007 Through 07-09-2007",

}

TY - CONF

T1 - (oral talk) Gettering of iron in silicon by boron implantation

AU - Haarahiltunen, Antti

AU - Talvitie, Heli

AU - Savin, Hele

AU - Anttila, O.

AU - Yli-Koski, Marko

AU - Asghar, M. I.

AU - Sinkkonen, Juha

N1 - Conference code: 11

PY - 2007

Y1 - 2007

KW - boron

KW - gettering

KW - iron

KW - silicon

KW - boron

KW - gettering

KW - iron

KW - silicon

KW - boron

KW - gettering

KW - iron

KW - silicon

M3 - Abstract

T2 - International Conference on Defects Recognition, Imaging and Physics of Semiconductors

Y2 - 3 September 2007 through 7 September 2007

ER -