(oral talk) Effect of transition metals on oxygen precipitation in silicon

Heli Talvitie, Antti Haarahiltunen, Marko Yli-Koski, Hele Savin, Juha Sinkkonen

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2008
MoE publication type	Not Eligible
Event	International Conference on Nanoscience and Technology - Stockholm, Sweden Duration: 2 Jul 2007 → 6 Jul 2007

Conference	International Conference on Nanoscience and Technology
Abbreviated title	ICNT
Country/Territory	Sweden
City	Stockholm
Period	02/07/2007 → 06/07/2007

Keywords

@conference{623a6c27e1b24d2a97f942227d2de661,

title = "(oral talk) Effect of transition metals on oxygen precipitation in silicon",

keywords = "oxygen, silicon, transition metals, oxygen, silicon, transition metals, oxygen, silicon, transition metals",

author = "Heli Talvitie and Antti Haarahiltunen and Marko Yli-Koski and Hele Savin and Juha Sinkkonen",

year = "2008",

language = "English",

note = "International Conference on Nanoscience and Technology, ICNT ; Conference date: 02-07-2007 Through 06-07-2007",

}

TY - CONF

T1 - (oral talk) Effect of transition metals on oxygen precipitation in silicon

AU - Talvitie, Heli

AU - Haarahiltunen, Antti

AU - Yli-Koski, Marko

AU - Savin, Hele

AU - Sinkkonen, Juha

PY - 2008

Y1 - 2008

KW - oxygen

KW - silicon

KW - transition metals

KW - oxygen

KW - silicon

KW - transition metals

KW - oxygen

KW - silicon

KW - transition metals

M3 - Abstract

T2 - International Conference on Nanoscience and Technology

Y2 - 2 July 2007 through 6 July 2007

ER -