(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Ville Vähänissi; Antti Haarahiltunen; Marki Yli-Koski; H. Talvitie; M. I. Asghar; Hele Savin

(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Ville Vähänissi, Antti Haarahiltunen, Marki Yli-Koski, H. Talvitie, M. I. Asghar, Hele Savin

Electron Physics Group (EPG)

Research output: Contribution to conference › Abstract › Scientific › peer-review

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Original language	English
Publication status	Published - 2009
MoE publication type	Not Eligible
Event	Conference on Gettering and Defect Engineering in Semiconductor Technology - Berlin, Germany Duration: 26 Sep 2009 → 2 Oct 2009 Conference number: 13

Conference

Conference	Conference on Gettering and Defect Engineering in Semiconductor Technology
Abbreviated title	GADEST
Country/Territory	Germany
City	Berlin
Period	26/09/2009 → 02/10/2009

Keywords

boron diffusion gettering
oxygen precipitation
phosphorus diffusion gettering

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savin_effect_of_oxygen_in_2009Accepted author manuscript, 497 KB

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@conference{7d3be18ad0ad4a5da1836d12edca7e73,

title = "(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon",

keywords = "boron diffusion gettering, oxygen precipitation, phosphorus diffusion gettering, boron diffusion gettering, oxygen precipitation, phosphorus diffusion gettering, boron diffusion gettering, oxygen precipitation, phosphorus diffusion gettering",

author = "Ville V{\"a}h{\"a}nissi and Antti Haarahiltunen and Marki Yli-Koski and H. Talvitie and Asghar, {M. I.} and Hele Savin",

year = "2009",

language = "English",

note = "Conference on Gettering and Defect Engineering in Semiconductor Technology , GADEST ; Conference date: 26-09-2009 Through 02-10-2009",

}

(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon. / Vähänissi, Ville; Haarahiltunen, Antti; Yli-Koski, Marki et al.

2009. Abstract from Conference on Gettering and Defect Engineering in Semiconductor Technology , Berlin, Germany.

Research output: Contribution to conference › Abstract › Scientific › peer-review

TY - CONF

T1 - (oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

AU - Vähänissi, Ville

AU - Haarahiltunen, Antti

AU - Yli-Koski, Marki

AU - Talvitie, H.

AU - Asghar, M. I.

AU - Savin, Hele

N1 - Conference code: 13

PY - 2009

Y1 - 2009

KW - boron diffusion gettering

KW - oxygen precipitation

KW - phosphorus diffusion gettering

KW - boron diffusion gettering

KW - oxygen precipitation

KW - phosphorus diffusion gettering

KW - boron diffusion gettering

KW - oxygen precipitation

KW - phosphorus diffusion gettering

UR - http://doi.10.4028/www.scientific.net/SSP.156-158.395

M3 - Abstract

T2 - Conference on Gettering and Defect Engineering in Semiconductor Technology

Y2 - 26 September 2009 through 2 October 2009

ER -

(oral talk) Effect of Oxygen in Low Temperature Boron and Phosphorus Diffusion Gettering of Iron in Czochralski-Grown Silicon

Conference

Keywords

Access to Document

OpenUrl availability

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