(oral talk) Doping in silicon affects the blistering of ALD-grown aluminium oxide

Jennifer Ott, Moises Garín, Kawa Rosta, Toni P. Pasanen, Ville Vähänissi, Hele Savin

Research output: Contribution to conference › Abstract › Scientific › peer-review

2 Finished

2 results

Finished
PREIN: Photonics Research and Innovation
Mäkelä, K.
01/01/2019 → 31/12/2022
Project: Academy of Finland: Other research funding
Photonics Research and Innovation
Savin, H., Ayedh, H., Rauha, I., Liu, H., Mulbagal Rajanna, P. & Vähänissi, V.
01/01/2019 → 31/12/2022
Project: Academy of Finland: Other research funding