(oral talk) Doping in silicon affects the blistering of ALD-grown aluminium oxide

Jennifer Ott, Moises Garín, Kawa Rosta, Toni P. Pasanen, Ville Vähänissi, Hele Savin

Research output: Contribution to conferenceAbstractScientificpeer-review

Original languageEnglish
Publication statusPublished - 2019
MoE publication typeNot Eligible
EventConference on Gettering and Defect Engineering in Semiconductor Technology - Seehotel Zeuthen, Zeuthen, Germany
Duration: 22 Sep 201927 Sep 2019
Conference number: 18
https://www.gadest2019.org/index.php

Conference

ConferenceConference on Gettering and Defect Engineering in Semiconductor Technology
Abbreviated titleGADEST
Country/TerritoryGermany
CityZeuthen
Period22/09/201927/09/2019
Internet address

Keywords

  • aluminium oxide
  • silicon
  • surface passivation
  • doping
  • blistering

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