(oral talk) Detection of iron contamination in internally gettered p-type silicon wafers by lifetime measurements

Antti Haarahiltunen; Hele Väinölä (Savin); Marko Yli-Koski; Eero Saarnilehto; Juha Sinkkonen

(oral talk) Detection of iron contamination in internally gettered p-type silicon wafers by lifetime measurements

Antti Haarahiltunen
, Hele Väinölä (Savin)
, Marko Yli-Koski
, Eero Saarnilehto
, Juha Sinkkonen

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2004
MoE publication type	Not Eligible
Event	Electrochemical Society Meeting - Honolulu, United States Duration: 3 Oct 2004 → 8 Oct 2004 Conference number: 206

Conference

Conference	Electrochemical Society Meeting
Abbreviated title	ECS
Country/Territory	United States
City	Honolulu
Period	03/10/2004 → 08/10/2004

Keywords

diffusion length
internal gettering
iron
lifetime
silicon

Cite this

@conference{71425b65ce204c4ab0eae30104140eba,

title = "(oral talk) Detection of iron contamination in internally gettered p-type silicon wafers by lifetime measurements",

keywords = "diffusion length, internal gettering, iron, lifetime, silicon, diffusion length, internal gettering, iron, lifetime, silicon, diffusion length, internal gettering, iron, lifetime, silicon",

author = "Antti Haarahiltunen and \{V{\"a}in{\"o}l{\"a} (Savin)\}, Hele and Marko Yli-Koski and Eero Saarnilehto and Juha Sinkkonen",

year = "2004",

language = "English",

note = "Electrochemical Society Meeting, ECS ; Conference date: 03-10-2004 Through 08-10-2004",

}

TY - CONF

T1 - (oral talk) Detection of iron contamination in internally gettered p-type silicon wafers by lifetime measurements

AU - Haarahiltunen, Antti

AU - Väinölä (Savin), Hele

AU - Yli-Koski, Marko

AU - Saarnilehto, Eero

AU - Sinkkonen, Juha

N1 - Conference code: 206

PY - 2004

Y1 - 2004

KW - diffusion length

KW - internal gettering

KW - iron

KW - lifetime

KW - silicon

KW - diffusion length

KW - internal gettering

KW - iron

KW - lifetime

KW - silicon

KW - diffusion length

KW - internal gettering

KW - iron

KW - lifetime

KW - silicon

M3 - Abstract

T2 - Electrochemical Society Meeting

Y2 - 3 October 2004 through 8 October 2004

ER -