(oral talk) Controlling SiO2 thin film charge and interface defect density on germanium

Hanchen Liu; Toni Pasanen; Oskari Leiviskä; Joonas Isometsä; John Fung; Marko Yli-Koski; Mikko Miettinen; Pekka J. Laukkanen; Ville Vähänissi; Hele Savin

(oral talk) Controlling SiO2 thin film charge and interface defect density on germanium

Hanchen Liu
, Toni Pasanen
, Oskari Leiviskä
, Joonas Isometsä
, John Fung
, Marko Yli-Koski
, Mikko Miettinen
, Pekka J. Laukkanen
, Ville Vähänissi
, Hele Savin

University of Turku

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2023
MoE publication type	Not Eligible
Event	International Conference on Solid State Devices and Materials - Nagoya Congress Center, Nagoya, Japan Duration: 5 Sept 2023 → 8 Sept 2023 https://www.ssdm.jp/index.html

Conference

Conference	International Conference on Solid State Devices and Materials
Abbreviated title	SSDM
Country/Territory	Japan
City	Nagoya
Period	05/09/2023 → 08/09/2023
Internet address	https://www.ssdm.jp/index.html

Cite this

@conference{0ef8b76d73634a0f8ca0cba69c943455,

title = "(oral talk) Controlling SiO2 thin film charge and interface defect density on germanium",

author = "Hanchen Liu and Toni Pasanen and Oskari Leivisk{\"a} and Joonas Isomets{\"a} and John Fung and Marko Yli-Koski and Mikko Miettinen and Laukkanen, \{Pekka J.\} and Ville V{\"a}h{\"a}nissi and Hele Savin",

year = "2023",

language = "English",

note = "International Conference on Solid State Devices and Materials, SSDM ; Conference date: 05-09-2023 Through 08-09-2023",

url = "https://www.ssdm.jp/index.html",

}

TY - CONF

T1 - (oral talk) Controlling SiO2 thin film charge and interface defect density on germanium

AU - Liu, Hanchen

AU - Pasanen, Toni

AU - Leiviskä, Oskari

AU - Isometsä, Joonas

AU - Fung, John

AU - Yli-Koski, Marko

AU - Miettinen, Mikko

AU - Laukkanen, Pekka J.

AU - Vähänissi, Ville

AU - Savin, Hele

PY - 2023

Y1 - 2023

M3 - Abstract

T2 - International Conference on Solid State Devices and Materials

Y2 - 5 September 2023 through 8 September 2023

ER -