(oral talk) Analysis of Heterogeneous Iron Precipitation in Multicrystalline Silicon

Antti Haarahiltunen; Ville Vähänissi; Marko Yli-Koski; Heli Talvitie; Hele Savin

(oral talk) Analysis of Heterogeneous Iron Precipitation in Multicrystalline Silicon

Antti Haarahiltunen, Ville Vähänissi, Marko Yli-Koski, Heli Talvitie, Hele Savin

Electron Physics Group (EPG)

Research output: Contribution to conference › Abstract › Scientific › peer-review

Original language	English
Publication status	Published - 2009
MoE publication type	Not Eligible
Event	Conference on Gettering and Defect Engineering in Semiconductor Technology - Berlin, Germany Duration: 26 Sep 2009 → 2 Oct 2009 Conference number: 13

Conference

Conference	Conference on Gettering and Defect Engineering in Semiconductor Technology
Abbreviated title	GADEST
Country/Territory	Germany
City	Berlin
Period	26/09/2009 → 02/10/2009

Keywords

iron precipitation
multicrystalline silicon
phosphorus diffusion gettering

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@conference{7a8b969494174d14a9566245cca4cf0b,

title = "(oral talk) Analysis of Heterogeneous Iron Precipitation in Multicrystalline Silicon",

keywords = "iron precipitation, multicrystalline silicon, phosphorus diffusion gettering, iron precipitation, multicrystalline silicon, phosphorus diffusion gettering, iron precipitation, multicrystalline silicon, phosphorus diffusion gettering",

author = "Antti Haarahiltunen and Ville V{\"a}h{\"a}nissi and Marko Yli-Koski and Heli Talvitie and Hele Savin",

year = "2009",

language = "English",

note = "Conference on Gettering and Defect Engineering in Semiconductor Technology , GADEST ; Conference date: 26-09-2009 Through 02-10-2009",

}

TY - CONF

T1 - (oral talk) Analysis of Heterogeneous Iron Precipitation in Multicrystalline Silicon

AU - Haarahiltunen, Antti

AU - Vähänissi, Ville

AU - Yli-Koski, Marko

AU - Talvitie, Heli

AU - Savin, Hele

N1 - Conference code: 13

PY - 2009

Y1 - 2009

KW - iron precipitation

KW - multicrystalline silicon

KW - phosphorus diffusion gettering

KW - iron precipitation

KW - multicrystalline silicon

KW - phosphorus diffusion gettering

KW - iron precipitation

KW - multicrystalline silicon

KW - phosphorus diffusion gettering

UR - http://www.scientific.net/SSP.156-158.27

M3 - Abstract

T2 - Conference on Gettering and Defect Engineering in Semiconductor Technology

Y2 - 26 September 2009 through 2 October 2009

ER -

(oral talk) Analysis of Heterogeneous Iron Precipitation in Multicrystalline Silicon

Conference

Keywords

OpenUrl availability

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