Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space

Behrad Radfar; Kexun Chen; Olli Setälä; Ville Vähänissi; Hele Savin; Xiaolong Liu

doi:10.1364/OL.481890

Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space

Behrad Radfar, Kexun Chen, Olli Setälä, Ville Vähänissi, Hele Savin, Xiaolong Liu^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

We study the surface morphology, optical absorption (400–1100 nm), and carrier lifetime of black silicon fabricated by femtosecond (fs) laser in air. We explore a large laser parameter space, for which we adopt a single parameter ξ to describe the cumulative fluence delivered to the sample. We also study the laser-oxidized surface layer by measuring its photoluminescence spectra and comparing its effect on the aforementioned properties. Our study in a broad range of ξ is instructive in choosing laser parameters when targeting different applications.

Original language	English
Pages (from-to)	1224 - 1227
Number of pages	4
Journal	Optics Letters
Volume	48
Issue number	5
DOIs	https://doi.org/10.1364/OL.481890
Publication status	Published - 1 Mar 2023
MoE publication type	A1 Journal article-refereed

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AU - Savin, Hele

AU - Liu, Xiaolong

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Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space

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-: Photonics Research and Innovation

NIR: Super-sensitive γ/X- and NIR-radiation detectors via defect-free nanostructures: Next Imaging Revolution?

FemtoBlack: Femtosecond laser sulfur hyperdoped black silicon for infrared photonic applications

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Carrier recombination in black silicon fabricated by high repetition rate fs-laser

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Optoelectronic properties of black silicon fabricated by femtosecond laser in ambient air: exploring a large parameter space

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-: Photonics Research and Innovation

NIR: Super-sensitive γ/X- and NIR-radiation detectors via defect-free nanostructures: Next Imaging Revolution?

FemtoBlack: Femtosecond laser sulfur hyperdoped black silicon for infrared photonic applications

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Carrier recombination in black silicon fabricated by high repetition rate fs-laser

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