Optimization of Porous Silicon Microstructure for humidity Sensor Applications

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	1999 MRS Fall Meeting, Boston, USA, November 29 - December 3, 1999
Pages	677
Publication status	Published - 1999
MoE publication type	A4 Conference publication

Keywords

@inproceedings{14f8c8e282844fcda980bed3e2eb798e,

title = "Optimization of Porous Silicon Microstructure for humidity Sensor Applications",

keywords = "humidity, porous silicon, sensor, humidity, porous silicon, sensor, humidity, porous silicon, sensor",

author = "J. Salonen and M. Bj{\"o}rkqvist and E. Laine and L. Niinist{\"o}",

year = "1999",

language = "English",

pages = "677",

booktitle = "1999 MRS Fall Meeting, Boston, USA, November 29 - December 3, 1999",

}

TY - GEN

T1 - Optimization of Porous Silicon Microstructure for humidity Sensor Applications

AU - Salonen, J.

AU - Björkqvist, M.

AU - Laine, E.

AU - Niinistö, L.

PY - 1999

Y1 - 1999

KW - humidity

KW - porous silicon

KW - sensor

KW - humidity

KW - porous silicon

KW - sensor

KW - humidity

KW - porous silicon

KW - sensor

M3 - Conference article in proceedings

SP - 677

BT - 1999 MRS Fall Meeting, Boston, USA, November 29 - December 3, 1999

ER -