Optimisation of ALCVD growth of aluminium nitride on porous silica from trimethylaluminium and ammonia precursors

R.L. Puurunen, M. Lindblad, A.O.I. Krause

    Research output: Working paperProfessional

    Original languageEnglish
    Pages99-100
    Publication statusPublished - 2000
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name9th Nordic Symposium on Catalysis, Stockholm, Sweden, 4.-6.6.2000
    PublisherThe Swedish Catalysis Society

    Keywords

    • aluminium nitride
    • atomic layer epitaxy

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