@inproceedings{ffbfb267d2c54f42945dd4e4574e71c5,
title = "Optically Dtected, framed Silicon Cantilever for High Precision Acoustic Sensing",
keywords = "gas sensing, optical sensor, photoacoustics, silicon cantilever, gas sensing, optical sensor, photoacoustics, silicon cantilever, gas sensing, optical sensor, photoacoustics, silicon cantilever",
author = "P{\"a}ivi Sievil{\"a} and Juha Fonsen and Ossi Hahtela and Nikolai Chekurov and Jyrki Kauppinen and Ilkka Tittonen",
year = "2007",
language = "English",
pages = "2605--2608",
booktitle = "Transducers'07 & Eurosensors XXI conference, Lyon, France 10-14 June",
}