Optically Dtected, framed Silicon Cantilever for High Precision Acoustic Sensing

Päivi Sievilä, Juha Fonsen, Ossi Hahtela, Nikolai Chekurov, Jyrki Kauppinen, Ilkka Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publicationTransducers'07 & Eurosensors XXI conference, Lyon, France 10-14 June
    Pages2605-2608
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Keywords

    • gas sensing
    • optical sensor
    • photoacoustics
    • silicon cantilever

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