Optical waveguides on polysilicon-on-insulator

Research output: Working paperProfessional

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Optical waveguides on polysilicon-on-insulator. / Säynätjoki, A.; Riikonen, J.; Reentilä, O.; Lipsanen, H.; Ahopelto, J.

2002. p. 275-278 (The 4th International Conference on Materials for Microelectronics and Nanoengineering, ICMMN-4, Espoo, Finland, 10-12 June, 2002).

Research output: Working paperProfessional

Harvard

Säynätjoki, A, Riikonen, J, Reentilä, O, Lipsanen, H & Ahopelto, J 2002 'Optical waveguides on polysilicon-on-insulator' The 4th International Conference on Materials for Microelectronics and Nanoengineering, ICMMN-4, Espoo, Finland, 10-12 June, 2002, pp. 275-278.

APA

Säynätjoki, A., Riikonen, J., Reentilä, O., Lipsanen, H., & Ahopelto, J. (2002). Optical waveguides on polysilicon-on-insulator. (pp. 275-278). (The 4th International Conference on Materials for Microelectronics and Nanoengineering, ICMMN-4, Espoo, Finland, 10-12 June, 2002).

Vancouver

Säynätjoki A, Riikonen J, Reentilä O, Lipsanen H, Ahopelto J. Optical waveguides on polysilicon-on-insulator. 2002, p. 275-278. (The 4th International Conference on Materials for Microelectronics and Nanoengineering, ICMMN-4, Espoo, Finland, 10-12 June, 2002).

Author

Säynätjoki, A. ; Riikonen, J. ; Reentilä, O. ; Lipsanen, H. ; Ahopelto, J. / Optical waveguides on polysilicon-on-insulator. 2002. pp. 275-278 (The 4th International Conference on Materials for Microelectronics and Nanoengineering, ICMMN-4, Espoo, Finland, 10-12 June, 2002).

Bibtex - Download

@techreport{e85500aff15d46fc9f621cee690a5cfa,
title = "Optical waveguides on polysilicon-on-insulator",
keywords = "semiconductors, synchrotron x-ray topography, semiconductors, synchrotron x-ray topography, semiconductors, synchrotron x-ray topography",
author = "A. S{\"a}yn{\"a}tjoki and J. Riikonen and O. Reentil{\"a} and H. Lipsanen and J. Ahopelto",
year = "2002",
language = "English",
series = "The 4th International Conference on Materials for Microelectronics and Nanoengineering, ICMMN-4, Espoo, Finland, 10-12 June, 2002",
pages = "275--278",
type = "WorkingPaper",

}

RIS - Download

TY - UNPB

T1 - Optical waveguides on polysilicon-on-insulator

AU - Säynätjoki, A.

AU - Riikonen, J.

AU - Reentilä, O.

AU - Lipsanen, H.

AU - Ahopelto, J.

PY - 2002

Y1 - 2002

KW - semiconductors

KW - synchrotron x-ray topography

KW - semiconductors

KW - synchrotron x-ray topography

KW - semiconductors

KW - synchrotron x-ray topography

M3 - Working paper

T3 - The 4th International Conference on Materials for Microelectronics and Nanoengineering, ICMMN-4, Espoo, Finland, 10-12 June, 2002

SP - 275

EP - 278

BT - Optical waveguides on polysilicon-on-insulator

ER -

ID: 4132562