Optical waveguides on polysilicon-on-insulator

Research output: Working paperProfessional

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Details

Original languageEnglish
Pages275-278
Publication statusPublished - 2002
MoE publication typeD4 Published development or research report or study

Publication series

NameThe 4th International Conference on Materials for Microelectronics and Nanoengineering, ICMMN-4, Espoo, Finland, 10-12 June, 2002

    Research areas

  • semiconductors, synchrotron x-ray topography

ID: 4132562