Optical waveguides on polysilicon-on-insulator

Research output: Contribution to journalArticleScientificpeer-review

Researchers

Research units

  • VTT Technical Research Centre of Finland

Details

Original languageEnglish
Pages (from-to)417-420
Number of pages4
JournalJournal of Materials Science: Materials in Electronics
Volume14
Issue number5
Publication statusPublished - May 2003
MoE publication typeA1 Journal article-refereed

    Research areas

  • optical waveguides, polycrystalline silicon, silicon-on-insulator

ID: 4152262