Optical waveguides on polysilicon-on-insulator

Antti Säynätjoki, Juha Riikonen, Harri Lipsanen

    Research output: Working paperProfessional

    Original languageEnglish
    Pages137
    Publication statusPublished - 2003
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameNorthern Optics 2003 conference, Espoo, 16-18 June, 2003

    Keywords

    • optical waveguides
    • polycrystalline silicon
    • silicon-on-insulator

    Cite this

    Säynätjoki, A., Riikonen, J., & Lipsanen, H. (2003). Optical waveguides on polysilicon-on-insulator. (pp. 137). (Northern Optics 2003 conference, Espoo, 16-18 June, 2003).