@article{b2356e61e6894a99afb1d744ce5f48ec,
title = "Optical waveguides on polysilicon-on-insulator",
keywords = "optical waveguides, polycrystalline silicon, silicon-on-insulator, optical waveguides, polycrystalline silicon, silicon-on-insulator, optical waveguides, polycrystalline silicon, silicon-on-insulator",
author = "Antti S{\"a}yn{\"a}tjoki and Juha Riikonen and Harri Lipsanen and Jouni Ahopelto",
year = "2003",
month = may,
doi = "10.1023/A:1023921305986",
language = "English",
volume = "14",
pages = "417--420",
journal = "Journal of Materials Science: Materials in Electronics",
issn = "1573-482X",
publisher = "Springer",
number = "5",
}