Optical waveguides on polysilicon-on-insulator

Antti Säynätjoki, Juha Riikonen, Harri Lipsanen, Jouni Ahopelto

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)417-420
    Number of pages4
    JournalJournal of Materials Science: Materials in Electronics
    Volume14
    Issue number5
    DOIs
    Publication statusPublished - May 2003
    MoE publication typeA1 Journal article-refereed

    Keywords

    • optical waveguides
    • polycrystalline silicon
    • silicon-on-insulator

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