Optical waveguide for integrated optical circuit and method for producing the optical waveguide

Timo Aalto (Inventor)

    Research output: Patent

    Original languageEnglish
    Patent numberKansainvälinen patentti, WO 03/985429 A1
    Publication statusPublished - 2003
    MoE publication typeH1 Granted patent

    Keywords

    • integrated optical circuit
    • integrated optics
    • multi-step patterning
    • optical waveguide
    • silicon on insulator
    • waveguide bend

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