@misc{a05d2b8c7bec4474b503a583c635904f,
title = "Optical Waveguide",
keywords = "integrated optical circuit, integrated optics, multi-step patterning, optical waveguide, silicon on insulator, waveguide transformer, integrated optical circuit, integrated optics, multi-step patterning, optical waveguide, silicon on insulator, waveguide transformer, integrated optical circuit, integrated optics, multi-step patterning, optical waveguide, silicon on insulator, waveguide transformer",
author = "Timo Aalto",
year = "2003",
language = "English",
type = "Patent",
note = "Kansainv{\"a}linen patentti, WO 03/985430 A1",
}